DaON-iL2000S
DaON-S series
[In-line Sputter]
SPECIFICATION
| Substrate size | Flat glass, 420 mm x 297 mm, 0.7mmt |
|---|---|
| Tray size | 30 mm(W) x 450 mm(L) x 330 mm(H) |
| Buffer zone Heating | IR ceramic plate heater |
| Process zone Heating | Sheath heater, Mold type |
| Tray moving Control | Servo motor & ball screw driving |