R&D Equipment

Sputter

DaON S

DaON-S series is an R&D equipment to research characteristics
of the thin film and develop devices to be used for a face to face or
Co-sputtering system for making in-situ multi-layer thin film.

Thermal & E-beam Evaporator

DaON TE

DaON-TE series is thermal and E-beam evaporation system
and is modular design configured to suit
a variety of thin film deposition for R&D.

Ion milling

DaON I

DaON I series is ion etching equipment for making
fine pattern used by ionized particles in vacuum.

Thermal CVD

Cheda

Cheda series are thin film deposition equipment
using a reaction to adhere gas atoms onto
a plate by ionizing the reactive gas.

OLED deposition

Orgon

Orgon constructed to allow deposition of
organic materials and metals within separate
process chambers for the next generation Organic LEDs
This id equipped with separate glove box for easy
handing od sources and controlling oxygen and moisture
under 3ppm to keep features od the film after deposition.

RTA

TTowa

TTowa series are R&D equipment for
vacuum heat treatment of a various kind if
thin films including metal,
alloy and non-metal oxide.