DaON-3000SL
DaON-S series
[3-Chamber Load lock type Sputter]
SPECIFICATION
| Substrate size | Max. 6 inch Single Glass |
|---|---|
| Substrate heating | 8inch mold heater |
| Process | Load lock - Process #1 - Process #2 |
| Source | 8inch circular RF magnetron |
| Target material | ZnO, AIZnO, etc |