DaON-100MS
DaON-S series
[Mini Sputter]
SPECIFICATION
| Chamber | Pyrex bell jar chamber |
|---|---|
| Substrate size | Max. 2 inch Single wafer |
| Target size | 2inch circular |
| power supply | 1kW DC power suppy |
| Dimension | 480(W) x 480(H) x 400(D) |