DaON-2000SL
DaON-S series
[2-Chamber Load lock type Sputter]
SPECIFICATION
| Substrate | size | 300 x 300 glass |
|---|---|---|
| Heating | Max. 500℃±3% | |
| Source | Type | Rectangulartype vertical mount |
| Target size | 400 x 110 x10t (mm) | |
| power supply | 1.25kW, RF, 13.56MHz | |
| Ultimate pressure | under 5 x 10-7 Torr |