TTowa-100
[Rapid Thermal Annealing]
GENERAL SPECIFICATION
| Chamber type | Quartz tube type with one side sample loading |
|---|---|
| Sample size | Dia. 2” or 50 x 50mm |
| Pumping | Rotary pump (400L/min) |
| Heating type | Hot wall lamp heater module with cooling |
| Heating uniform zone | 200mm |
| Heating Max. Temp | 1,000℃ within 20sec |