Orgon-100
[OLED equipment]
GENERAL SPECIFICATION
| Substrate | size | 50 x 50mm |
|---|---|---|
| Ultimate pressure | 5x10-6 Torr | |
| Evaporation source | Organic chamber | Tugsten boat 2kW (1set) |
| Effusion cell (5sets) | ||
| Metal chamber | Tugsten boat 2kW (3sets) | |
| Effusion cell (2sets) | ||
| Uniformity | Vaporize | ≤±5% @ 1000Å (Alq3) |
| Stability | Effusion cell: ≤±0.05Å @ 1Å/s | |
| Thermal boat: ≤±0.1Å @ 1Å/s | ||
| Glove box | O2 ＆ H2 ＜ 3ppm | |
| Mask alignment | ＜ 300㎛ | |
| Number of changeable mask | 3ea |