Cheda-1000AP
APCVD
GENERAL SPECIFICATION
| Substrate | Quartz tube |
|---|---|
| Graphite susceptor | |
| Sample size | 15 x 15mm single wafer |
| Heater | RF induction heater |
| Max. Temp.: 1,300℃ | |
| Gas source | H2, N2, NH3, SiH4 |
| MO source | Ga, Al, In, Mg |
| Gas | Gas leak detection module |
| Base pressure | 9 x 10-4 torr |
| Pumping | Chemical Dry pump(122m3/h) |