- System classification: Pulsed Laser Deposition system for R&D
- General Speicification
A. Stainless steel 304 chamber
a. Port assigenment
- ISO160 for gate valve
- ISO100 for target carroussel
- ISO160 for heating module
- ISO63 for LASER incident window (3" x 1/4"t)
- and so on.
B. Heating module
a. Heater movable stroke: X-axis (+/- 20mm), Y-axis (+20, -30mm)
C. Pumping module
a. Gate valve
b. TMP
c. Rotary pump (200l/min) with oil mist trap
D. Vacuum gauge controller
a. Low vacuum gauge (Pirani)
b. High vacuum gauge (Hot ion)
c. CDG (Baratron, 1torr)
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Precious post
